Positioning systems for optical measuring instruments

For reflected and transmitted light measurements, CROSS series XY stages are particularly suitable due to their large free aperture. Their compact design makes travel ranges between 50 and 190 mm possible even in restricted spaces - individually adapted to the respective application.

Linear stages of the LTM series are the best basis to build systems for camera-based measurements, interferometry and microscopy. Available options such as a parallel motor, the bellows cover, travels up to 400 mm as well as the easy individualisation with additional axes make them a practical component for the system setup for sample and sensor positioning.

The combination of two high-precision linear stages of the LIMES series and a HUMES elevator stage allows exact sample positioning in three axes. This system is designed for large loads and can also be used for mechanical testing such as in tactile profilometers or scratch testers.

An x-y-z system consisting of linear axes of the LTM series makes the three-dimensional positioning of measuring objects or sensors in space possible. We see areas of application for these system setups primarily in optical and tactile measurement processes.

In spectroscopic ellipsometry or reflectometry, exact angular adjustment can be performed using an x-y theta-phi positioning unit consisting of LTM linear stages and a MOGO goniometer. The system can easily be extended with further degrees of freedom by means of our rotary and elevator stages.