Application-specific product solutions for ultra high vacuum (UHV)

Designed for applications in ultra high vacuum down to 10-9 mbar we have a wide product portfolio for beam handling and positioning systems. We can flexibly realize individual modifications. Enriched with OWIS know-how and ensured by our extensive measurements and quality tests:

  • Only UHV suitable aluminium alloys, plastics, ceramics and greases
  • All blind holes opened
  • 1.5 m Kapton strands with nickel-coated shielding braid
  • UHV suitable connector (DSub-HD) made of PEEK - customized connectors on request
  • Mechanical limit or reference switches
  • UHV suitable motors with special grease lubrication
  • Cleaned, assembled and measured in the clean room
  • Residual gas analysis for verification of UHV suitability
  • Safely packed and double shrink-wrapped in foil

Our requirements for a mass spectrum UHV

The UHV products are baked out in the vacuum chamber at approximately 80 °C and measured after a heating cycle of a maximum of 12 hours. A mass spectrum from 0 to 100 u is recorded at a pressure lower than 10-7 mbar. The peaks values in the range of 45 to 100 u are more than two decades below the highest mass peak in the range from 0 to 44 u. 

Application in other vacuum ranges:

High vacuum (HV)

We offer the wide OWIS product portfolio of optical beam handling and positioning systems for applications in the high vacuum down to 10-6 mbar.

Let's talk about your HV application

Extremely high vacuum (XHV)

In the extremely high vacuum range, we have established an outstanding position in recent years and have the corresponding know-how and infrastructure to realize products for applications in the XHV ranges down to 10-11 mbar.

Let’s realize your XHV product


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