OEM solutions for clean rooms

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WAFERS FOR MEASURING AND TESTING TASKS ALIGNING PRECISELY

The X-Y-θx-θy manipulator, designed for the clean room and built to customer specifications, enables precise positioning in four axes. With travels adapted to the application and a compact design, it is optimally prepared for tasks in semiconductor manufacturing, for example for aligning wafers for measuring and testing tasks.

The manipulator, designed for the clean room and developed specifically for the customer, enables precise positioning in four axes.

In the realization of this OEM solution, we contributed our engineering and clean room expertise. All parts of the system were cleaned, assembled, measured and tested in our cleanroom.

Key features

  • X-Y-θx-θy manipulator
  • Customized layout for precise positioning in four axes
  • Designed for clean room applications
  • Compact shape on a small footprint
  • Internal cable routing - no moving cables outside the system
  • Easy system integration

Typical applications

  • Measuring and testing tasks under clean room conditions

Competences

HIGHEST PRECISION AND RELIABILITY FOR THE CLEAN ROOM

Semiconductor technology

Image processing and metrology

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